JPH0317226Y2 - - Google Patents

Info

Publication number
JPH0317226Y2
JPH0317226Y2 JP1982173626U JP17362682U JPH0317226Y2 JP H0317226 Y2 JPH0317226 Y2 JP H0317226Y2 JP 1982173626 U JP1982173626 U JP 1982173626U JP 17362682 U JP17362682 U JP 17362682U JP H0317226 Y2 JPH0317226 Y2 JP H0317226Y2
Authority
JP
Japan
Prior art keywords
flow rate
bypass
flow
sleeve
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982173626U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5978927U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17362682U priority Critical patent/JPS5978927U/ja
Publication of JPS5978927U publication Critical patent/JPS5978927U/ja
Application granted granted Critical
Publication of JPH0317226Y2 publication Critical patent/JPH0317226Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)
JP17362682U 1982-11-18 1982-11-18 熱式質量流量計の分流機構 Granted JPS5978927U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17362682U JPS5978927U (ja) 1982-11-18 1982-11-18 熱式質量流量計の分流機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17362682U JPS5978927U (ja) 1982-11-18 1982-11-18 熱式質量流量計の分流機構

Publications (2)

Publication Number Publication Date
JPS5978927U JPS5978927U (ja) 1984-05-28
JPH0317226Y2 true JPH0317226Y2 (en]) 1991-04-11

Family

ID=30378191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17362682U Granted JPS5978927U (ja) 1982-11-18 1982-11-18 熱式質量流量計の分流機構

Country Status (1)

Country Link
JP (1) JPS5978927U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7591177B2 (en) 2008-02-12 2009-09-22 Hitachi Metals, Ltd. Flow sensor and mass flow controller using the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10982985B2 (en) * 2019-03-04 2021-04-20 Hitachi Metals, Ltd. High flow tubular bypass

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5416708A (en) * 1977-07-07 1979-02-07 Kyokuto Kikai Seisakusho:Kk Low noize fan
JPS5544180Y2 (en]) * 1979-06-13 1980-10-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7591177B2 (en) 2008-02-12 2009-09-22 Hitachi Metals, Ltd. Flow sensor and mass flow controller using the same

Also Published As

Publication number Publication date
JPS5978927U (ja) 1984-05-28

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